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. Recordar el Concierto.. jai ma roman de guerre en ancien françaisIn a photolithography process which is one of the processes for manufacturing a semiconductor device, a semiconductor wafer (hereinafter, referred to as a wafer) such as a silicon wafer is subjected to various processes including a film forming process, an etching process, a resist process and the like, in a processing device having a processing chamber.
In the processing chamber, for example, a processing gas is exhausted from an exhaustion port of the processing chamber to the outside. The processing gas exhausted to the outside of the processing chamber is supplied to a process target object such as the wafer disposed in the processing chamber through an exhaust pipe having an exhaust port formed on a base thereof and a gas supply port formed on a top thereof.
As an example of a processing device including a gas supply port, there is known a processing device including a partition wall which partitions a top plate and a bottom plate of the processing chamber. For example, a bottom face of the partition wall is formed as a gas supply port having a plurality of gas supply holes at a prescribed interval, and the processing gas supplied from the gas supply port into the processing chamber is diffused and mixed in the chamber.
Meanwhile, in a conventional processing device, two cleaning procedures, namely, a pre-cleaning procedure and a cleaning procedure, are conducted before and after a wafer transfer. The pre-cleaning procedure is a cleaning procedure conducted before the wafer transfer. The pre-cleaning procedure includes a cleaning procedure for removing foreign matter and residues from a processing chamber. Then, the wafer transfer is a wafer transfer in which a wafer is accommodated in a wafer transfer robot arm with a carrier used for transporting the wafer. Further, the cleaning procedure is a cleaning procedure conducted after the wafer transfer and includes cleaning procedures for removing foreign matter and residues which adhere to a carrier and the like, and the like.
Meanwhile, in the wafer transfer, the wafer is accommodated in the wafer transfer robot arm. Therefore, oxygen, which is present in air, may be introduced into a space within the wafer transfer robot arm through the wafer transfer. Further, the wafer transfer robot arm

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[instr]
[pre-chorus]
[ ]
[ ]
[ ]
[chorus]
[repeat chorus]
[repeat chorus]
[repeat chorus]
[post-chorus]
[repeat pre-chorus]
[outro]
[instrumental]
Rene Gonzalez – Otra Decada (El Concierto).rar
[instrumental]
[end]
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